Seminar: Prof. Jens Gobrecht

Title: Synchrotron-based EUV radiation for nanolithography and actinic mask inspection

Speaker: Prof. Jens Gobrecht, Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, Villigen
Date: Wednesday, May 11, 2016
Location:University of Fribourg, Department of Physics, small auditorium 0.51
The National Centers of Competence in Research (NCCR) are a research instrument of the Swiss National Science Foundation
Hosted by: Adolphe Merkle Institute - Chemin des Verdiers 4 - CH-1700 Fribourg - Phone +41 26 300 9266